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            >> >> Ҙ˜ >> Ҙ˜

             

            Ҙ˜Ҏfһ 
              ĿǰmӆҎձ߀Dz“˜209209D209E֮ӆ˜Mһ֮Bc໥^1-1“˜209D֮Ҏ

            1-1 “˜209DҎ

            ҵȼClass)

            ΢m ض LcQʣ/hr) նlux
            ӴСum ӔĿParticles/ft3 mmAg ֵ MAX% СMIN% `%

            ʽ0.35~0.55 m/s

            1080

            ~

            1620

            1 R0.5 Q1
            1.3
            19.4~25
            22.2 ±2.8

            ±1.4

            45 30 ±10

            ±5

            R5.0 0
            10 R0.5 Q10
            R5.0 0
            100 R0.5 Q100
            R5.0 Q1
            1000 R0.5 Q1000
            yʽR20 /hr
            R5.0 Q10
            10000 R0.5 Q10000
            R5.0 Q65
            100000 R0.5 Q100000
            R5.0 Q700
              209E209D֮ͬc209Eʾλ˹Ɔλҵȼ“M”^ʾM1M1.5M2M2.5M3......ĿχHƆλ֮˜ʻMĸ֮ĿÿШR0.5um֮΢mӔĿ10ăηʾȡָ֮΢mӔǰȫη֮gt1.52.53.5......ȱʾ֮1-219929C֮“˜209E֮ǰ֮MĸĔɏı0.5umеĔֵx߿ԇ֮

            1-2 “˜209E

            ȵȼ

            ΢m

            0.1um

            0.2um

            0.3um

            0.5um

            5um

            λ

            λ

            λ

            λ

            λ

            Ӣ

            (m3)

            (ft3)

            (m3)

            (ft3)

            (m3)

            (ft3)

            (m3)

            (ft3)

            (m3)

            (ft3)

            M1

             

            350

            9.91

            75.7

            2.14

            30.9

            0.875

            10.0

            0.283

            -

            -

            M1.5

            1

            1240

            35.0

            265

            7.50

            106

            3.00

            35.3

            1.00

            -

            -

            M2

             

            3500

            99.1

            757

            21.4

            309

            8.75

            100

            2.83

            -

            -

            M2.5

            10

            12400

            350

            2650

            75.0

            1060

            30.0

            353

            10.0

            -

            -

            M3

             

            35000

            991

            7570

            214

            3090

            87.5

            1000

            28.3

            -

            -

            M3.5

            100

            -

            -

            26500

            750

            10600

            300

            3530

            100

            -

            -

            M4

             

            -

            -

            75700

            2140

            30900

            875

            10000

            283

            -

            -

            M4.5

            1000

            -

            -

            -

            -

            -

            -

            35300

            1000

            247

            7.00

            M5

             

            -

            -

            -

            -

            -

            -

            100000

            2830

            618

            17.5

            M5.5

            10000

            -

            -

            -

            -

            -

            -

            353000

            10000

            2470

            70.0

            M6

             

            -

            -

            -

            -

            -

            -

            1000000

            28300

            6180

            175

            M6.5

            100000

            -

            -

            -

            -

            -

            -

            3530000

            100000

            24700

            700

            M7

             

            -

            -

            -

            -

            -

            -

            10000000

            283000

            61800

            1750

              “˜FS 209D ӢÿӢߞλձtDzùÿߞλ209DcձJISB9920-1989˜һͬc209D0.5um֮ӔӋձt0.1um΢ӞӋ˜ձ˜֮ʾClass1,Class2,Class3,......Class8ʾ֮ȼClass1,tClass8,1-3ձJIS9920-1989֮˜Ҏޔ/m3Class1Class2...֮Ŀ0.1umӞÿ΢mӿл10֮ηȡָ

            1-3 ձJIS9920 ~1989˜

            Class1 Class2 Class3 Class4 Class5 Class6 Class7 Class8
            0.1 101 102 103 104 105 106 107 108
            0.2 2 24 236 2360 23600 - - -
            0.3 1 10 101 1010 10100 101000 1010000 10100000
            0.5 - - 35 350 3500 35000 350000 3500000
            5.0 - - - - 29 290 2900 29000

             

            YρԴClean Room Technology By Crystal Cs. The Nederlands

             

             

             

            Ҙ˜Ҏf
              ڵ‡ItW֮IǞPaIҕlչ֮g1967˵‡ĝҎڵ‡ҎНҵȼ֮ʾcҎͬʾ4*10”ʽʾ0.5um֮Ӕָ֮nҎȼ4*103 ʾȼ3˵ȼc“ҎClass1001-4‡ҎS֮ӔcƵȼ֮ʾ

            1-4 ‡Ҏ

            ȼ ΢m(um) ceȼ^
            0.5 1 5
            3 4*103 1*103 - 100 4000
            4 4*104 1*104 0.03*104 - -
            5 4*105 1*105 0.03*105 10000 400000
            6 4*106 1*106 0.03*106 100000 4000000

            1-5“˜209D˜֮Ŀֵ/ft30.5uӞʣcձ֮Ҏʾ֮λͬ׌ʹˆTһ֮@֪֮˜ʵȼ\ڹбҪ֮gһȼe֮Q1-6

            1-5 209DҎӔֵ

            ȼ Class1 Class10 Class100 Class1000 Class10000 Class100000
            0.1 351225 35012250 - - - -
            0.2 7.5263 752630 75026300 - - -
            0.3 3105 301050 30010500 - - -
            0.5 135 10350 1003500 100035000 10000350000 1000003500000
            5.0 - - - 7 70 700
            *ֵ֮λ/M3

            1-6 ՝ȼeQ

            ձ
            e3 Class 1
            e4 Class 10
            e5 Class 100
            e6 Class 1000
            e7 Class 10000
            e8 Class 100000

              ձ‡֮Ҙ˜Ӣ޼nЇ֮Ҏ1-6ȵȼҎ֮^

            1-6 ȵȼҎ

            ձ Ӣ ‡ n Ї
            Ҏ FS209D FS209E JIS B 9920 BS 5295 VDI 2083 AFN 4410 AS 1386 KS QJ2214
            1988 1992 1989 1989 1990 1981 1989 1991 1991
            (um) 0.5 0.5 0.1 0.5 1 0.5 0.5 0.3 0.1 0.5
            λ pcs/ft3 pcs/M3 pcs/M3 pcs/M3 pcs/M3 pcs/M3 pcs/M3 pcs/M3 pcs/M3
            Class - - 1 - - - - M1 0.1um ~1
            - M1 2 - 0 - - M10 0.1um ~5
            1 M1.5 3 C 1 - 0.035 M100 0.1um ~10
            10 M2.5 4 D 2 - 0.35 M1000 1
            100 M3.5 5 E or F 3 4,000 3.5 M10000 100
            1000 M4.5 6 G or H 4 - 35 M100,000 1,000
            10,000 M5.5 7 I 5 400,000 350 M1,000,000 10,000
            100,000 M6.5 8 J 6 4,000,000 3500 M10,000,000 100,000
            - M7 - K 7 - - - -
            - - - L - - - - -
            *0.5um^e

             

            YρԴClean Room Technology By Crystal Cs. The Nederlands

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